MarSurf3D | 3D surface measurement

MarSurf3D MS SX-Platform

Art. no. 6350029

Cleverly combined: Use the new MarSurf3D SX platform with the new multi-sensor measuring head, which combines area-based measuring technologies. This means you can perform all surface measurements down to the lower nanometer range with a single device. The SX platform shows its strengths with smaller workpieces with axis sizes up to max. 200 mm.

MarSurf3D MS SX-Platform
Flexible all-round measuring solution MS

Maximum flexibility is achieved by combining the individual technologies: Confocal, white light interferometry and focus variation. The different strengths of the technologies can be utilized in one measuring system.
Confocal
The specially developed and patented multi-pinhole technology ensures ultra-fast image capture with the highest signal quality, resulting in maximum repeatability down to the subnano-meter range. This technology is suitable for a wide range of applications in the field of surface metrology, from smooth to very rough surfaces.
Interferometry
Interferometry offers a vertical resolution in the subnanometer range, regardless of the magnification. This allows surface heights in the NM range to be recorded on large measuring fields. Interferometry comes into its own on very smooth and continuous surfaces and is also suitable for the ultra-precise determination of step heights.
Focus variation
Focus variation with active lighting is a technology developed for measuring the geometry of large  rough surfaces. Steeply inclined surfaces (up to 86°) in particular and a large vertical measuring range can be recorded in one measurement.
Typical measuring tasks
  • Roughness measurements as per
    ISO 21920 / 4287 & ISO 13565 / ISO 25178
  • Topography measurements (including volume, wear, tribology)
  • contour and form (2D, 3D)
  • pore, particle analysis
  • defect detection
  • ...
Maximum data quality

One of our most important criteria, which equates to excellent precision, accuracy, repeatability, reproducibility and documentation to ensure traceability and auditability. Our greatest service for the customer is to provide a quantitative measuring value that can be implemented reliably in the engineering, product, process design and quality control areas etc.
Misura corretta e riproducibile
Your measuring data is recorded reliably, can be replicated, and guarantees the highest quality of raw data and profile accuracy.
Ampia gamma di pezzi da lavorare
Material-independent measurement of any geometries and surface characteristics regardless of whether they are reflective, absorbent, opaque or transparent.
Utilizzo intuitivo
Simple, user-guided interface with automatic modes for all significant measuring parameters, including use of measurement protocols for known surfaces.
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